| TP01 : KJSC17-B20-R30 |
| Measuring Pount |
MP01 |
MP02 |
MP03 |
MP04 |
| Parameter set 1 |
| Air Cleanliness Class (acc. to ISO 14644-1) |
1 |
1 |
2 |
1 |
| Parameter set 2 |
| Air Cleanliness Class (acc. to ISO 14644-1) |
1 |
1 |
1 |
1 |
| Parameter set 3 |
| Air Cleanliness Class (acc. to ISO 14644-1) |
1 |
2 |
1 |
2 |
| TP02 : KJSC24-B40-R50 |
| Measuring Pount |
MP05 |
MP06 |
MP07 |
MP08 |
| Parameter set 1 |
| Air Cleanliness Class (acc. to ISO 14644-1) |
2 |
2 |
1 |
7 |
| Parameter set 2 |
| Air Cleanliness Class (acc. to ISO 14644-1) |
6 |
5 |
1 |
7 |
| Parameter set 3 |
| Air Cleanliness Class (acc. to ISO 14644-1) |
6 |
6 |
2 |
7 |
| TP02 : KJSC40-B50-R110 |
| Measuring Pount |
MP09 |
MP10 |
MP11 |
MP12 |
| Parameter set 1 |
| Air Cleanliness Class (acc. to ISO 14644-1) |
1 |
1 |
1 |
1 |
| Parameter set 2 |
| Air Cleanliness Class (acc. to ISO 14644-1) |
1 |
1 |
2 |
1 |
| Parameter set 3 |
| Air Cleanliness Class (acc. to ISO 14644-1) |
1 |
1 |
1 |
1 |
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독일 IPA 클린룸 사용인증 (CLASS2) 요약